半导体集成电路制造的重要设备之一，主要用于POLY, D-POLY, SiN,TEOS。
LPCVD equipment is one of the important equipments for semiconductor integrated circuit manufacturing,which is mainly used for the growth of LP-POLY,LP-DPOLY,LP-SiN，LP-TEOS thin films.
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详细信息 半导体集成电路制造的重要设备之一，主要用于POLY, D-POLY, SiN,TEOS。 LPCVD equipment is one of the important equipments for semiconductor integrated circuit manufacturing,which is mainly used for the growth of LP-POLY,LP-DPOLY,LP-SiN，LP-TEOS thin films. |