电弧石英坩埚
ARC Quartz Crucibles
用电弧法生产的乳白石英坩埚是拉制大直径单晶硅，发展大规模集成电路必不可少的基础材料。它具有高纯度、耐温性强、尺寸大精度高、保温性好、节约能源、质量稳定等优点。我公司还可以生产各种尺寸的透明和半透明材质的石英坩埚。这些产品可以根据应用范围按标准规格生产，也可以按您要求定做非标准规格的坩埚。
Opaque quartz crucible of arc melting usedfor semiconductor industry is the essential basic material for pullingmonocrystalline silicon and developing L S I circuit. It has the advantages ofhigh purity, high temperature resistance with big size, good thermalinsulation, economization on energy, quality stability etc. We also can producevarious specifications of transparent and translucent crucibles. Cruciblescan be produced according to the standard or produced on customer’s required specification and shape.
化学成分分析
Chemical element composition
型号/Type | Al | Fe | Ca | Cu | K | Na | Li | B | OH |
EAST-A | 20 | 1 | 1.5 | 0.1 | 3 | 3 | 3 | 0.3 | 30 |
EAST-B | 15 | 0.3 | 0.6 | 0.05 | 0.7 | 1.0 | 0.7 | <0.1 | 30 |
坩埚规格尺寸
Crucible Dimensions
坩埚尺寸 Dimensions | 外径 OD | 高度 Height | 厚度(WT) | R | r | ||
T1 | T2 | T3 | |||||
8" | 203±03 | 153±3 | 5.5±1.5 | 3 | 8.5 | 305 | 30 |
10" | 254±2 | 178±3 | 6.0±1.5 | 3.5 | 9 | 305 | 70 |
12" | 305±2 | 228±3 | 6.5±1.5 | 4 | 9.5 | 305 | 80 |
14" | 355±2 | 254±3 | 7.5±1.5 | 5 | 10.5 | 400 | 90 |
16" | 404±2 | 305±3 | 8.5±1.5 | 6 | 11.5 | 400 | 90 |
18" | 457±2 | 355±3 | 8.5±1.5 | 6 | 11.5 | 500 | 120 |
20" | 508±4 | 381±3 | 10±3 | 6 | 11.0 | 500 | 120 |
22" | 558±4.5 | 381±3 | 10±3 | 7 | 11.0 | 558 | 89 |
24" | 610±4.5 | 381±3 | 12±3 | 12±3 | 12±3 | 610 | 130 |