产品规格书
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蓝宝石偏角度单晶衬底（2~6英寸） | |||
材料成分 | >99.99%，High Purity， Mono-crystalline Al2O3 (KY) | ||
晶向类型C-M | C-axis (0001) off-cut 0.5°~10° ± 0.1° toward M (1-100) | ||
晶向类型C-A | C-axis (0001) off-cut 0.5°~8° ± 0.1° toward A (11-20) | ||
晶向类型A-M | A-axis (11-20) off-cut 0.5°~6° ± 0.1° toward M (1-100) | ||
晶向类型A-C | A-axis (11-20) off-cut 0.5°~6° ± 0.1° toward C (0001) | ||
晶向类型R-M | R-axis (1-102) off-cut 0.5°~6° ± 0.1° toward M (1-100) | ||
晶向类型R-C | R-axis (1-102) off-cut 0.5°~6° ± 0.1° toward C (0001) | ||
晶向类型M-C | M-axis (1-100) off-cut 0.5°~6° ± 0.1° toward C (0001) | ||
直径 | 50.8mm | 100mm | 150mm |
厚度 | 430um | 650um | 1000um |
定位边晶向 | A-plane ± 0.3° | ||
定位边长度 | 16mm | 30mm | 47.5mm |
正面状态 | Epi-polished,Ra<0.3nm | ||
反面状态 | SSP:Fine-ground,Ra=0.8-1.2um; DSP:Epi-polished,Ra<0.3nm | ||
总厚度偏差TTV | <10 um | <20 um | <25 um |
弯曲度BOW | -15～0 um | -25～0 um | -35～0 um |
翘曲度WARP | <15 um | <30 um | <40 um |
边缘去除 | ≤2 mm | ||
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产品性能表
蓝宝石单晶 Sapphire | |
晶体结构 | 六方晶体 |
禁带宽度(eV) | / |
熔点（℃） | 2040℃ |
莫氏硬度(mohs) | 9 |
热导率(W·cm-1·℃-1) | 0.46W·cm-1·℃-1 |
热膨胀系数(℃-1) | 6.7*10-6 // C-axis |
晶格常数(nm) | a=4.76Å c=12.99Å |
折射率 | 1.762~1.777 |
透过率 | 测试样品：蓝宝石：直径76.2毫米×厚度4毫米 |