一、制备方法：无压烧结法
Fabrication: Pressureless Sintering
ITO靶材以磁控溅射等方式用于导电玻璃的制备。ITO膜具有导电性以及对可见光的透明性和对红外线的反射性三个特性，广泛用于显示屏、玻璃幕墙、太阳能电池、雷达屏蔽、冰柜、防雾玻璃等产品，尤以显示屏为大宗。
ITO (indium tin oxide) target is used to make conductive glass with
technologies such as magnetron sputtering. With such valuable properties
as good electric conductivity, excellent transparency for visible light
and high reflectivity for infrared ray, ITO film is widely used in
display panels (major application), glass screens, solar cells, radar
shields, freezer boxes, fog-proof windshields, among others.
三、技术指标：Specifications
|
性能 Properties |
单位Unit |
标准值Standard Value |
|
|
化学成分 Chemical composition |
wt% |
In2O3:SnO2=90:10 Others are subject to the requirements of the customers |
|
|
**规格Maximum Size |
mm |
1150×380×(6.0-10) |
|
|
相对密度Relative Density |
--- |
≥99.8% |
|
|
理论密度Theoretical density |
g/cm3 |
7.156 |
|
|
体积电阻率Volume Resistivity |
Ω·cm |
1.6×10-4 |
|
|
抗弯强度Bending Strength |
MPa |
>150 |
|
|
纯度purity |
--- |
≥99.99% |
|
|
失氧率Oxygen loss rate |
--- |
≤0.5% |
一、 ICP杂质检测
|
杂质元素 |
含量(ppm) |
|
Si |
12 |
|
Fe |
1.5 |
|
Ca |
<5.0 |
|
Na |
2.0 |
|
Cu |
1.1 |
|
Cd |
<1.0 |
|
Pb |
<1.0 |