LPCVD立式炉

半导体集成电路制造的重要设备之一，主要用于POLY, D-POLY, SiN,TEOS。

LPCVD equipment is one of the important equipments for semiconductor integrated circuit manufacturing,which is mainly used for the growth of LP-POLY,LP-DPOLY,LP-SiN，LP-TEOS thin films.